Method for determining thickness of chemical vapor deposited layers

ABSTRACT

The thickness of a layer of material deposited by chemical vapor deposition, especially a diamond layer, is monitored by providing at least one substrate on which the material is deposited, with at least one perforation of a predetermined size therein. The relationship between the thickness of the layer formed in said perforation and the thickness of the layer formed on the substrate surface is determined, so that the thickness of the surface layer can be determined from the thickness of the layer formed in the perforation.

This application is a division, of application Ser. No. 07/991,798,filed Dec. 16, 1992, now U.S. Pat. No. 5,300,313.

This invention relates to the production of diamond and other materialsby chemical vapor deposition, and more particularly to the deposition ofdiamond layers of a predetermined thickness.

Chemical vapor deposition (hereinafter sometimes "CVD") is employed forproducing a number of materials. Its use to produce diamond at hightemperature and low pressure from a mixture of hydrogen and ahydrocarbon gas is a method of increasing importance for the productionof industrial diamond. The CVD diamond procedure is particularly usefulfor producing layers of diamond which can be fabricated into such itemsas heat sinks for electronic applications. Diamond, having a very highthermal conductivity, is particularly useful as a raw material for suchheat sinks.

The thickness tolerances required for heat sinks are usually very close.For example, a typical heat sink material may be on the order of 0.3-0.4mm. in thickness and substantial deviation from the prescribed thicknessis not tolerated.

In a typical CVD diamond operation, a layer of diamond is deposited on asubstrate, typically molybdenum, by high temperature (e.g., microwave orhot filament) activation of a mixture of hydrogen and a hydrocarbon suchas methane. The rate of diamond deposition on the substrate varieswidely from run to run, and the time period required to deposit a layerof useful thickness may be many days since the typical deposition rateis on the order of 10-15 microns per day.

The production of diamond layers of predetermined thickness has beendifficult because, in order to prepare a suitable monolithic diamondlayer, it is necessary to conduct the CVD operation uninterrupted, andthere is no accurate way to monitor thickness during the depositionoperation. As a result, it may be necessary to continue deposition for aperiod longer than that required to produce the desired thickness. Suchcontinuation is not fatal, since the diamond sheet can be removed fromthe substrate and machined to the desired thickness. However, this iswasteful of both time and energy. On the other hand, cessation of thedeposition operation before the desired thickness has been attained isfatal and it may be necessary to discard the diamond thus deposited.

It is, therefore, extremely desirable to develop a method fordetermining the thickness of a layer of CVD-deposited material duringthe deposition operation. Such a method is provided by the presentinvention.

The invention in one of its aspects is a method for depositing a layerof material of a specific desired thickness on the surface of at leastone substrate by chemical vapor deposition which comprises:

mounting said substrate or substrates in chemical vapor depositionapparatus so that at least one perforation of a predetermined sizeexists in the plane of said substrate or substrates,

depositing said layer on said substrate,

monitoring the thickness of the layer formed in said perforation,

determining the relationship between the thickness of the layer formedin said perforation and the thickness of the layer formed on thesubstrate surface, and

stopping deposition when the thickness of the layer formed on saidperforation is consistent with the formation of a layer of said desiredthickness on said surface.

The drawings are graphs of the thicknesses of CVD diamond layers on thewalls of holes of various diameters in a substrate, as a function oftime of deposition.

FIGS. 1-4 respectively correspond to hole diameters of 353, 469, 623 and832 microns, as explained in more detail hereinafter.

The details of the CVD operation, as well as the equipment and materialsused therein, need not be repeated here since they are well known in theart. For materials other than diamond, the process may involve thereaction between a metal (e.g., tungsten or rhenium) halide andhydrogen; for diamond, it involves the reaction of a hydrocarbon withatomic hydrogen. The essential items are a vessel in which the CVDoperation is conducted, typically under reduced pressure; a substratewithin said vessel on which the diamond is deposited, means forintroducing the reactive gases into said vessel and into contact withthe substrate, and activation means to create reactive conditions. Inthe case of diamond, a hot filament or microwave generator is typicallyemployed for activation of the hydrogen-hydrocarbon mixture.

The method of the invention is particularly useful for diamondproduction, and will be described hereinafter in that context. It shouldbe understood, however, that said method may also be applied to the CVDdeposition of other materials.

According to the present invention, at least one substrate is mounted inthe CVD apparatus so that one or more perforations exist in the planethereof. The word "perforation" is used herein as defined in item 2a ofWebster's New Collegiate Dictionary, 1981 edition; i.e., "a hole orpattern made by or as if by piercing or boring".

Thus, it is within the scope of the invention to employ a singlesubstrate with at least one hole of predetermined size bored through it.Alternatively, a plurality of substrates may be mounted in the sameplane, with spaces of known distance between them. Those skilled in theart will recognize that multiple substrates containing holes, as well asother equivalent embodiments, may also be employed.

If a hole is bored through the substrate, it may 10 be circular orirregular (for example, elliptical) in shape, but there is usually noadvantage in an irregular shape and a circular hole is thereforepreferred. If desired, a plurality of holes of the same or differentsizes may be created, to assist in determining the consistency ofthickness of the diamond layer.

The dimensions and especially the diameter or width of the perforationare predetermined as described hereinafter so that the observedthickness of the CVD diamond layer formed in the perforation can berelated to the thickness of the layer formed on the surface of thesubstrate. It is thus possible to monitor the appearance of theperforation during the CVD operation, and to discontinue deposition whenthe layer on the surface is of approximately the desired thickness.

In a relatively simple embodiment, the CVD operation is continued untilthe perforation is bridged. This is convenient when the size of theperforation is related to the desired thickness of the surface layer sothat bridging occurs when said desired thickness has been reached.However, it is also contemplated to employ a larger perforation and tomore closely monitor the thickness of the layer formed on the wallsthereof which are at an angle to, and preferably perpendicular to, thesurface.

Such monitoring may be visual, optionally assisted by such equipment asa video camera connected to monitoring (and, optionally, recording)means, whereby the perforation appears on a monitor, usually magnified,and its actual size may easily be determined. Alternatively, automatedmonitoring means may be employed. For example, it is possible to use aphotocell in combination with computerized graphing equipment, whichwill show a sharp drop in transmitted light intensity at the time ofclosure of the perforation. Suitable equipment for this purpose will bereadily apparent to those skilled in the art.

Monitoring of the perforation may be from back to front or from front toback. If it is from back to front, it may be convenient to locate theperforation opposite a heated filament if such a filament is employed,whereupon the light emitted by the filament will aid in determining whenthe perforation has been bridged. It is frequently more convenient,however, to monitor the perforation from front to back since it thenappears as a dark spot on a light surface, rather than the opposite.

The dimensions and particularly the width of the perforation are animportant factor in the operation of the invention. As a firstapproximation, it might be assumed that the width of the perforationshould be at least twice the desired thickness of the diamond layer,since the layer produced in said perforation will grow on both sides atonce. In practice, however, diamond growth is somewhat slower in theperforation than elsewhere on the substrate surface by reason of thenecessity to fill said perforation, at least partially, with diamond.

The relationship between the width of a circular hole and the thicknessof a diamond layer grown on a molybdenum substrate was determined in anapparatus which included a magnifying lens located a specific distancefrom the substrate, linked to a video camera which in turn fed a signalto a video cassette recorder (for data preservation) and a videomonitor. The relationship of hole size to the size actually shown on themonitor was calculated precisely.

Four holes, with diameters of 353, 469, 623 and 832 microns, were boredthrough the substrate, which was then mounted in the CVD apparatus.Diamond deposition was initiated and the decrease in diameter of eachhole was noted periodically. At the end of the deposition period ofabout 185 hours, the thickness of the diamond coating on the surface wasdetermined.

It was found that the decreases in the sizes of the four holes wererelatively consistent. It was further found that an actual thickness ofabout 211 microns on the surface corresponded to a thickness of about163 microns on the hole walls.

This is shown in the drawings, each of which represents the thickness ofthe diamond layer deposited in a hole of the indicated thickness. Thepoint in each figure not located on the curve is the thickness of thediamond layer on the surface at the conclusion of the deposition period.It is apparent that the diamond thickness on the hole walls isrelatively consistent and independent of the diameter of the hole.

Thus, it was determined that, as a general rule, the width (diameter inthe case of a circular hole) of the hole should be at least about150-160% of the desired thickness of the diamond layer in order for thehole to be completely bridged or the diamond coating on the wallsthereof measurable when the desired surface thickness is reached. In anyindividual CVD system, the relationship can be determined as necessaryby simple experimentation.

In any event, precise accuracy is not necessary so long as monitoring ofthe thickness of the diamond layer in the perforation indicates that thediamond layer on the substrate is of at least the requisite thickness.It will then be possible to terminate the run within a reasonable tinreafter said thickness has been attained, saving time and energy. Undermost circumstances, it can be assumed that the rate of diamonddeposition will be about 12 microns per day.

Another aspect of the present invention is an apparatus for chemicalvapor deposition as described hereinabove. Said apparatus comprises:

an enclosure adapted to be maintained at a pressure and temperaturesuitable for chemical vapor deposition,

feed means for feeding reagents suitable for chemical vapor depositionto said enclosure,

at least one of reagent activation and temperature control means formaintaining chemical vapor deposition conditions in said enclosure, and

at least one substrate in said enclosure, said substrate or substratesbeing adapted to receive a chemical vapor deposited layer and having atleast one perforation of a predetermined size therein, said size havinga determinable relation to the thickness of a layer of chemical vapordeposited material to be formed on the surface of said substrate.

Said apparatus may also comprise perforation monitoring means, of any ofthe types previously described, for aiding in determining the thicknessof the diamond layer formed in said perforation, as by noting when it isbridged. Such means are essential when the perforation cannot be viewedfrom outside the enclosure.

What is claimed is:
 1. Apparatus for chemical vapor deposition,comprising:an enclosure adapted to be maintained at a pressure andtemperature suitable for chemical vapor deposition, feed means forfeeding reagents suitable for chemical vapor deposition to saidenclosure, at least one of reagent activation and temperature controlmeans for maintaining chemical vapor deposition conditions in saidenclosure, and at least one substrate in said enclosure, said substrateor substrates being adapted to receive a chemical vapor deposited layerand having at least one perforation therein, the size of saidperforation having a determinable relation to the thickness of a layerof chemical vapor deposited material to be formed on the surface of saidsubstrate; and means for monitoring said perforation during the chemicalvapor deposition operation to determine the thickness of said layer. 2.Apparatus according to claim 1 wherein said feed means are adapted tofeed hydrogen and a hydrocarbon gas to said enclosure.
 3. Apparatusaccording to claim 2 which includes a single substrate and wherein theperforation is a hole in said substrate.
 4. Apparatus according to claim3 wherein the hole is circular.
 5. Apparatus according to claim 2 whichincludes a plurality of substrates mounted in the same plane with spacesof known distance between them.
 6. Apparatus according to claim 2wherein the width of said perforation is at least about 150-160% of thethickness to be produced in said layer.
 7. Apparatus according to claim2 wherein said monitoring means is automated.